Regensburg 2010 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 33: Nanostructures at surfaces: arrays

O 33.2: Vortrag

Dienstag, 23. März 2010, 15:15–15:30, H31

UTAM Surface Nano-Patterning in Fabricating Quantum-Sized Nanodots — •Yong Lei, Stefan Ostendorp, Stefan Bartels, and Gerhard Wilde — Institute of Materials Physics and Center for Nanotechnology, University of Muenster, Wilhelm-Klemm-Str. 10, D-48149 Muenster, Germany

Two challenging technical points prevent the UTAM (ultra-thin alumina mask) surface patterning technique to synthesize surface structures within the quantum-sized range: (1) the arrangement regularity and monodispersity of UTAM pores are poor when the pore diameter is smaller than 20-25 nm; (2) it is difficult to obtain small-pore UTAMs that are suitable for the surface patterning. This prevents the fabrication of quantum-sized surface structures using the UTAM technique, thus an attractive feature of nanomaterials - the quantum confinement effect - is missing in the UTAM technique. Recently, we found a new route to prepare UTAMs with pores in the quantum-sized range and consequently to synthesize ordered arrays of quantum-dots. First, a modulated anodization process largely decreased the growth rate of UTAMs, and thus results in UTAMs with a thickness of about 80 nm. Regular arrays of nanodots with diameters of about 20 nm were fabricated using the UTAMs. Moreover, we proposed a pore-opening process of UTAMs that can well-control the pore-size of UTAMs in the range of 5 to 27 nm. Ordered arrays of surface nanodots within the similar size range can be fabricated. This is the first time in realizing regularly arrayed surface nanostructures in the quantum-sized range using the UTAM surface nano-patterning technique.