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Regensburg 2010 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 87: Methods: Other (experimental)

O 87.4: Vortrag

Freitag, 26. März 2010, 12:00–12:15, H42

SMART-II: the Next Generation of Aberration Corrected Spectro-MicroscopyHelder Marchetto, Marcel Springer, •Thomas Schmidt, and Hans-Joachim Freund — Fritz Haber Institute of the MPG, Dept. CP, Berlin, Germany

The unique SMART (Spectro-Microscope with Aberration correction for many Relevant Techniques), built up within a collaboration [1] with the University Würzburg, TU Darmstadt, TU Clausthal and Zeiss (LEO) Oberkochen, combines electron spectroscopy with electron microscopy at high lateral and energy resolution to obtain spatially resolved information about the morphology, chemical distribution, work function and structural properties on nanometer scale. The basic instrument is a Low Energy Electron Microscope (LEEM) and Photo-Emission Electron Microscope (PEEM) equipped with an imaging energy analyzer and an aberration corrector, compensating simultaneously for both, the spherical and the chromatic aberrations. This leads to an outstanding lateral resolution of 2.6 nm which is twice as good as for an uncompensated LEEM/PEEM. Basing on the optical design of this prototype instrument, a new microscope is under construction, called SMART-II. It combines a commercial LEEM instrument with the well proven corrector system of SMART-I and a newly designed electrostatic imaging energy filter. We will discuss the advantages of this concept which are threefold: (a) higher electronic stability and therefore improved lateral resolution, (b) an improved reliability and (c) better maintenance for routine operation. [1] R. Fink et al., J. Electr. Spectrosc. Rel. Phen. 84, 231 (1997)

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