Berlin 2012 – wissenschaftliches Programm
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DF: Fachverband Dielektrische Festkörper
DF 13: Poster II
DF 13.13: Poster
Mittwoch, 28. März 2012, 15:00–17:30, Poster E
Production of sub-µm to cm structures on fused silica by laser-induced front side etching using self-regenerating adsorber layer (SAL-LIFE) — •Pierre Lorenz, Martin Ehrhardt, and Klaus Zimmer — Leibniz-Institut of Surface Modification, Permoserstr. 15, 04318 Leipzig, Germany
Laser-induced front side etching (LIFE) is a method for production of 3D structures in dielectric materials over a wide lateral and vertical size range. Within this study the continuous laser-induced front side etching of fused silica with self-regenerating adsorber layers (SAL-LIFE) is presented using nanosecond KrF excimer laser radiation (λ = 248 nm, Δ tp = 25 ns). The sample was positioned in a vacuum chamber which was loaded by toluene gas and the gas phase induced the self-regenerating adsorber layer on the sample surface. For the etching process, the laser beam was focused onto the sample surface through the gas. The SAL-LIFE method allows the production of well-defined nm-precision etched surface structures over a large etching depth range from nm to a few hundred µm as well as a large lateral etching region from sub-µm to a few cm. A surface roughness down to 1 nm can be achieved. The treated fused silica was analysed with microscopic (white light interferometry, scanning electron microscopy (SEM)) and spectroscopic methods (X-ray photoelectron spectroscopy (XPS)).