Berlin 2012 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 1: Layer properties: electrical, optical, and mechanical properties
DS 1.2: Vortrag
Montag, 26. März 2012, 09:45–10:00, H 0111
Characterizing periodic gratings and metamaterials using spectroscopic ellipsometry — •Thomas Oates1, Babak Dastmalchi2, Goran Isic3, Iris Bergmair4, Kurt Hingerl2, and Karsten Hinrichs1 — 1Leibniz Institut für Analytische Wissenschaften - ISAS - e.V., 12489 Berlin — 2Johannes Kepler University, Linz — 3Institute of Physics Belgrade, Belgrade — 4PROFACTOR GmbH, Steyr-Gleink, Austria
The recent availability of relatively large area Vis-NIR metamaterials (cm2) now allows accurate optical measurements by well established plane-wave reflection and transmission techniques. In this work we use spectroscopic ellipsometry (SE) to characterize subwavelength periodic gratings and fishnet metamaterials with artificial magnetic resonances. The materials are fabricated by nanoimprint lithography (NIL). Three samples are investigated, all with period of 365 nm; a single layer square silver grating on silicon; a 3 layer silver/SiO2/silver grating on silicon; and an identical 3 layer grating on glass. VASE data is measured from 245 - 1700 nm. We will show that a comparative study of the same metamaterials on different substrates assists in mode identification, but changes the effective material parameters. Any ellipsometric investigation necessarily requires consideration of the angular-dependent optical response. We will show that this aids in the identification of the physical origin of the optical modes. We will conclude by exploring the potential of standard ellipsometric analysis to identify magnetic-type resonances and negative refraction.