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Berlin 2012 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 14: Ion irradiation effects

DS 14.1: Vortrag

Dienstag, 27. März 2012, 11:45–12:00, H 0111

In-Situ Investigation of Swift Heavy Ion Induced Dewetting in Edge- and Hole-Symmetry — •Knut Dautel, Redi Ferhati, Daniel Garmatter, Susanne Weidenfeld, and Wolfgang Bolse — Institut für Halbleiteroptik und Funktionelle Grenzflächen, Universität Stuttgart

Previous experiments have shown that swift heavy ion (SHI) irradiation of thin oxide films on Si-substrates results in dewetting patterns even at temperatures far below the coatings melting point [1]. It was found that an initially coherent and smooth film under SHI bombardment breaks up into circular holes which then grow in diameter until they coalesce and form a meander- or dot-like structure of the film material. In our present study we have extended the materials range by the metallic glass Fe40Ni40B20, in addition to NiO and Fe2O3, and furthermore changed the initial geometry by coating only half of the substrate, with a sharp edge between the uncovered and the covered side. In this case different dewetting kinetics are expected because of the infinite lateral curvature radius of the backward moving edge as compared to the circular rim around holes (which also form in the coherent part of the film). The experiments were carried out with our in-situ SEM/EDX-setup at the UNILAC accelerator of the Helmholtz Center for Heavy Ion Research (GSI) as decribed in [2]. We will compare the dewetting rates for the above mentioned different symmetries and materials in order to shed light on the dewetting mechanisms and the driving forces. [1] T. Bolse, et al., Nucl. Instr. Meth. 245 (2006), [2] S. Amirthapandian et al., Rev. Sci. Instr. 81 (2010)

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