Berlin 2012 – wissenschaftliches Programm
Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe
DS: Fachverband Dünne Schichten
DS 37: Poster II: Focused electron beam induced processing for the fabrication of nanostructures (focused session, jointly with O); Nanoengineered thin films; Layer properties: electrical, optical, and mechanical properties; Thin film characterization: structure analysis and composition (XRD, TEM, XPS, SIMS, RBS,..); Application of thin films
DS 37.18: Poster
Donnerstag, 29. März 2012, 15:00–17:00, Poster E
Structure and thermal stability of laser deposited ZrO2/Ti multilayers — •Sarah Hoffmann, Benedikt Ernst, Tobias Liese, and Hans-Ulrich Krebs — Georg-August-Universität, Göttingen, Germany
ZrO2/Ti thin multilayer systems have important applications in X-ray optics, especially in the ’water window’ regime (wavelengths: 2.3-4.4 nm) as X-ray mirrors and multilayer Laue lenses (MLLs) [1]. To increase the resolution of MLLs, which is defined by the thickness of their thinnest layers, it is necessary to prepare as small structures as possible. With regard to the structural stability of the layers a lower limit of the layer thickness can be determined. While using, the X-ray optic may be exposed to elevated temperatures so that a precise knowledge about the thermal stability of these multilayer systems is also required. Several measurement techniques like X-ray reflectometry (XRR including IMD simulations), X-ray diffraction (XRD) and transmission electron microscopy (TEM) were applied to study the structure after preparation and in situ the phase transformations of the components during heating. The observed results are discussed with respect to the processes occurring during annealing of the multilayers (structural changes, crystallization of the amorphous oxides, changes in the oxygen content of the layers,...).
T. Liese, V. Radisch, and H.U. Krebs, Rev. Sci. Instrum. 81 (2010) 073710.