Berlin 2012 – wissenschaftliches Programm
Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe
DS: Fachverband Dünne Schichten
DS 37: Poster II: Focused electron beam induced processing for the fabrication of nanostructures (focused session, jointly with O); Nanoengineered thin films; Layer properties: electrical, optical, and mechanical properties; Thin film characterization: structure analysis and composition (XRD, TEM, XPS, SIMS, RBS,..); Application of thin films
DS 37.26: Poster
Donnerstag, 29. März 2012, 15:00–17:00, Poster E
Production and structural characterization of nanolayers of Ruddlesden-Popper phases SrO(SrTiO3)n with n=1, 2 und 3 — •Diana Karsch, Emanuel Gutmann, Hartmut Stöcker, Erik Mehner, and Dirk-Carl Meyer — TU Bergakademie Freiberg, Inst. für Exp. Physik
The strontium titanate Ruddlesden-Popper phases (STO-RP) represent ordered compounds of strontium oxide and strontium titanate with prominent piezoelectric, dielectric and photocatalytic properties. Two different methods for manufacturing nanolayers consisting these compounds are analyzed.
The first method follows the citrate route while the second aimes at additional networking using a modified Pechini route. The prepared sols were characterized by their molecular structure with magnetic resonance spectroscopy and regarding their wetting behavior with viscosity measurements. The films, produced using both methods with different process parameters, were characterized by reflected light microscopy, atomic force microscopy, X-ray reflectometry, X-ray diffraction and spectroskopic ellipsometry.
It turns out that the modified Pechini route results in no additional networking. The annealed films possess a thickness of 75...180 nm and contain solely STO-RP phase n=1 only by adapting the tempering parameters, all STO-RP phases n=1,2 and n=3 occur together.