Berlin 2012 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 37: Poster II: Focused electron beam induced processing for the fabrication of nanostructures (focused session, jointly with O); Nanoengineered thin films; Layer properties: electrical, optical, and mechanical properties; Thin film characterization: structure analysis and composition (XRD, TEM, XPS, SIMS, RBS,..); Application of thin films
DS 37.34: Poster
Donnerstag, 29. März 2012, 15:00–17:00, Poster E
Investigation of local texture and crystallite size in thin FePtCu films via EBSD — •Nathanael Jöhrmann, Herbert Schletter, Christoph Brombacher, Manfred Albrecht, and Michael Hietschold — Institut für Physik, Technische Universität Chemnitz, 09107 Chemnitz
FePt shows a very high uniaxial magnetocrystalline anisotropy in its chemical ordered L10 phase. Therefore thin FePt films are a promising candidate to raise the storage density of magnetic storage devices. For such applications it is necessary to grow films with (001) texture. The addition of copper can improve the texture formation during annealing [1].
In this work a FePtCu alloy with 9 at.% Cu was investigated via electron backscatter diffraction. The film was prepared by magnetron sputtering of 0.6 nm Cu and 4.4 nm FePt at room temperature on a thermally oxidized Si(100) substrate, followed by rapid thermal annealing to 600 ∘C for 30 s. Because of the small observed crystallite sizes in a range of 10 - 100 nm it proved difficult to obtain good electron backscatter diffraction patterns. To improve spatial resolution, the acceleration voltage of the electrons in the scanning electron microscope was optimized. In another approach, the substrate was thinned from the back to a thickness of approximately 100 nm, to reduce the interaction volume of the primary electrons.
[1] M. L. Yan et al., J. Appl. Phys. 99, 08G903 (2006)