Berlin 2012 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 37: Poster II: Focused electron beam induced processing for the fabrication of nanostructures (focused session, jointly with O); Nanoengineered thin films; Layer properties: electrical, optical, and mechanical properties; Thin film characterization: structure analysis and composition (XRD, TEM, XPS, SIMS, RBS,..); Application of thin films
DS 37.41: Poster
Donnerstag, 29. März 2012, 15:00–17:00, Poster E
Multilayer zone plates for x-ray focusing fabricated by pulsed laser deposition — •Florian Döring, Christian Eberl, Tobias Liese, and Hans-Ulrich Krebs — Institut für Materialphysik, University of Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany
X-ray microscopy in the soft and hard regime is a highly useful technique for biological and materials sciences, polymer research, colloidal science and even earth science. One alternative approach for two-dimensional x-ray focusing is to prepare non-periodic multilayer structures. They can be designed in zone plate geometry by depositing high quality non-periodic multilayers on wires according to the Fresnel zone plate law. For this, ZrO2/Ti and W/Si multilayers with high optical contrast in the soft and hard x-ray region, respectively, were pulsed laser deposited (PLD) at 248 nm. In this contribution, the growth of multilayers on flat and curved surfaces (studied by electron microscopy after focused ion beam preparation) is compared, and the fabrication steps of different zone plate structures are presented.