Berlin 2012 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 37: Poster II: Focused electron beam induced processing for the fabrication of nanostructures (focused session, jointly with O); Nanoengineered thin films; Layer properties: electrical, optical, and mechanical properties; Thin film characterization: structure analysis and composition (XRD, TEM, XPS, SIMS, RBS,..); Application of thin films
DS 37.44: Poster
Donnerstag, 29. März 2012, 15:00–17:00, Poster E
Functional thin films prepared by high power impulse magnetron sputtering — •Vitezslav Stranak1, Harm Wulff1, Robert Bogdanowicz1, Henrike Rebl2, Carmen Zietz3, Zdenek Hubicka4, Kathleen Arndt5, Barbara Nebe2, Rainer Bader3, Andreas Podbielski5, and Rainer Hippler1 — 1University of Greifswald, Institute of Physics, Felix-Hausdorff Str. 6, 17489 Greifswald, Germany — 2University of Rostock, Biomedical Res. Center, Schillingallee 69, 18057 Rostock, Germany — 3University of Rostock, Dept. of Orthopaedics, Doberaner Str. 142, 18057 Rostock, Germany — 4Academy of Sciences of the Czech Republic, Inst. of Physics, Na Slovance 2, 180 00 Prague, Czech Republic — 5University of Rostock, Dept. of Med. Microbiol., Virology and Hygiene, Schillingallee 70, 18057 Rostock, Germany
Antibacterial effect of thin titanium/copper (Ti-Cu) films in combination with growth of human osteoblastic cells on the surface is reported. Thin films were prepared by dual-High Power Impulse Magnetron Sputtering (dual-HiPIMS). The quality and properties of deposited films are influenced by internal plasma parameters (mainly by the energy of particles incoming to the growing film). The Ion Velocity Distribution Function (IVDF) was measured by a retarding field analyzer (RFA). It was found that films are copper rich with a density close to pure bulk Cu material (investigated by GIXD and XR techniques). This effect, together with larger domain size, results from the high energy of sputtered particles during HiPIMS pulses.