Berlin 2012 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 38: Poster III: Resistive switching (jointly with DF, KR, HL); Thermoelectric materials (Focused session); Micro- and nanopatterning (jointly with O); Ion irradiation effects

DS 38.20: Poster

Donnerstag, 29. März 2012, 17:30–19:00, Poster E

Fabrication of a CuO/ZnO thin film thermoelectric generator — •Tobias Lind, Gert Homm, Peter J. Klar, Bruno K. Meyer, Achim Kronenberger, Torsten Henning, Daniel Reppin, and Stefan Lautenschlaeger — I. Physikalisches Institut, Justus Liebig University, Heinrich-Buff-Ring 16, 35392 Giessen

Cuprous oxide and zinc oxide are promising candidates for thermoelectric applications as an alternative to the well known Te-based thermoelectric materials, since they are stable up to high temperatures, environmentally friendly and available in abundance. A further advantage is their processability down to the micrometer range. Thin films of about 400 nm thickness were either CVD grown on MgO substrates or sputtered on glass substrates. These films were microfabricated by photolithography and wet chemical etching to create the p-type legs of a thermoelectric generator (TEG). In a second lithography and sputter depostion step the n-type legs of the TEG, created from 400 nm of ZnO, were placed in between the CuO legs to create the desired p-n-leg structure of the thermoelectric generator. The legs were connected by metallic microcontacts made from Ti/Au on ZnO or Au on CuO, respectively. First measurements of the thermoelectric voltage and the output power of the generator are presented.