Berlin 2012 – wissenschaftliches Programm
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MA: Fachverband Magnetismus
MA 47: Micro- and Nanostructured Magnetic Materials II
MA 47.7: Vortrag
Donnerstag, 29. März 2012, 18:45–19:00, EB 202
Co/Pd multilayers on SiOx pillar arrays at ultra-high density — •Fabian Ganss1, Birgit Hebler1, Andrea Cattoni2, Anne-Marie Haghiri-Gosnet2, and Manfred Albrecht1 — 1Institute of Physics, Chemnitz University of Technology, 09107 Chemnitz, Germany — 2Laboratory for Photonics and Nanostructures, CNRS, 91460 Marcoussis, France
In order to demonstrate the preparation of ultra-high density bit patterned media, Co/Pd multilayers with perpendicular magnetic anisotropy were sputter deposited onto arrays of SiOx pillars. These substrates were prepared by electron beam lithography and high temperature post-baking of HSQ resist [1] and provide pillars of various diameters at different pitches down to 26 nm, the latter corresponding to a potential storage density of 1.1 Tbit/in2. The deposition was carried out under different deposition angles up to 60∘ to investigate the benefit of the shadowing effect while keeping a constant layer thickness by compensating the lower effective deposition rate by an increased process time. SQUID-VSM measurements of these films on planar substrates confirm comparable magnetic properties. The coated pillar arrays were investigated by MFM to prove exchange decoupling between the magnetic dots and estimate the switching field distributions. The exchange decoupling was proven successfully at densities up to 0.95 Tbit/in2.
[1] A. Cattoni et al., Microelectron. Eng. 87, 1015-1018 (2010)