Regensburg 2013 – wissenschaftliches Programm

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DF: Fachverband Dielektrische Festkörper

DF 19: Poster 2

DF 19.8: Poster

Mittwoch, 13. März 2013, 15:00–17:30, Poster B2

Laser-induced nanostructure fabrication in fused silica surfaces: experiment and theory — •Pierre Lorenz, Frank Frost, Martin Ehrhardt, and Klaus Zimmer — Leibniz-Institut für Oberflächenmodifizierung e. V., Permoserstraße 15, 04318 Leipzig, Germany

The fabrication of dielectric nanostructures is a big challenge for laser methods. The IPSM - LIFE method (IPSM - LIFE: laser induced front side etching using in situ pre-structured metal layers) allows the easy and fast production of complex surface structures into dielectric with lateral sizes down to 20 nm. At the IPSM - LIFE process, the irradiation of thin metal film deposited onto the fused silica substrate with low laser fluences results in the formation of complex metal structures by self-assembly processes and to a formation of a surface structure into the dielectric due to the melting, restructuring and resolidification of the dielectric surface. Further laser irradiation of the formed metal structures with high laser fluences causes the formation of complex patterns at the dielectric surface. The resultant structures were studied by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The experimental results were compared with surface structures obtained from finite element method (FEM) simulations.