Regensburg 2013 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 13: Poster Session III: Layer properties: electrical, optical and mechanical properties; Thin film characterization: structure analysis and composition (XRD, TEM; XPS, SIMS, RBS..)
DS 13.15: Poster
Montag, 11. März 2013, 17:00–20:00, Poster B1
Laser-induced phase transitions in PLD-deposited Ge2Sb2Te5-films using single nanosecond UV-pulses — •Erik Thelander1, Hongbing Lu1,2, Ulrich Ross1, Jürgen Gerlach1, and Bernd Rauschenabch1 — 1Institute of Surface Modification, Leipzig, Germany — 2Hubei University, Wuhan, China
Phase transformations between amorphous and metastable crystalline state were induced by irradiation with a 248 nm single nanosecond pulse in films grown with pulsed laser deposition. By adjusting the laser fluence, the two different phases were obtained and could be distinguished by differences in optical reflectivity. Detailed structural analysis was carried out with XRD and HRTEM to elucidate the effect of laser fluence on the crystalline nature of the samples. Large structural differences between laser-annealed and thermally annealed films were revealed, in terms of lattice constant expansion and grain size evolution. This is believed to originate from the fast heating rate and short duration of the laser pulse. X-ray reflectivity measurements showed a 3.58 % densification upon laser-induced crystallization.