Regensburg 2013 – wissenschaftliches Programm
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MM: Fachverband Metall- und Materialphysik
MM 60: Nanomaterials - Nanoparticles
MM 60.2: Vortrag
Donnerstag, 14. März 2013, 16:00–16:15, H25
Role of oxygen on stabilization of TiOx cluster production by gas aggregation cluster source — •Amir Mohammad Ahadi1, Vladimir Zaporojtchenko1,3, Alexander Martin Hinz1, Tilo Peter1, Oleksandr Polonskyi2, Thomas Strunkus1, and Franz Faupel1 — 1Faculty of Engineering, Institute for Material Science, Multicomponent Materials, Christian Albrechts University, Kaiserstr. 2, D-24143 Kiel, Germany — 2Faculty of Mathematics and Physics, Charles University, Prague, Czech Republic — 3deceased on 31.08.2012
Reactive DC magnetron sputtering from a Ti target combined with a gas aggregation chamber was applied to form TiOx clusters. Continuing previous work [1] the role of oxygen (as a reactive gas) on stabilization of TiOx cluster formation has been investigated. It was observed that at appropriate sputter conditions and by adding a certain oxygen flow, high and stabilized cluster deposition can be achieved. But already small changes of the oxygen flow lead to unstable cluster deposition rates. Further experiments at different magnetron power showed that the required oxygen flow for stabilization of the cluster deposition rate depends strongly on the magnetron power used. Analysis of the escaped oxygen concentration - from aggregation chamber as determined by mass spectrometry- indicates the crucial role of the reactive gas for cluster formation on the one side and poisoning of the target on the other side.
[1] T. Peter, O. Polonskyi, B. Gojdka, A.M. Ahadi, T. Strunskus, V. Zaporojtchenko, H. Biederman, F. Faupel, J. Appl. Phys., accepted(2012).