Regensburg 2013 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 10: Nanostructures at Surfaces I

O 10.9: Vortrag

Montag, 11. März 2013, 12:30–12:45, H45

Continuum modeling of particle redeposition during ion-beam erosion — •Christian Diddens and Stefan J. Linz — Institut für Theoretische Physik, Westfälische Wilhelms-Universität Münster

We have thoroughly investigated the effect of particle redeposition during ion-beam erosion for normal ion incidence within the framework a continuum model. The complicated highly non-local redeposition effect can be approximated in terms of the relative surface height with coefficients depending on the surface aspect ratio. For reasonable surface morphologies, our results are universal, i.e. do not qualitatively depend on the specific details of the sputter yield, preferred erosion directions or whether one or two lateral dimensions are considered. Furthermore, we show that an interplay of erosion, diffusion and redeposition is generically able to reproduce the hexagonally arranged nanodot patterns found in experiments with semiconductor targets.