Regensburg 2013 – wissenschaftliches Programm
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ST: Fachverband Strahlen- und Medizinphysik
ST 1: Poster
ST 1.1: Poster
Mittwoch, 13. März 2013, 11:00–13:00, Poster B2
Detector Characterization for Ultra-high Resolution X-ray Laminography — •Thomas Ebensperger1,2, Charlotte Rimbach1, Simon Zabler1, and Randolf Hanke1,2 — 1Lehrstuhl für Röntgenmikroskopie, Julius-Maximilians-Universität Würzburg, Josef-Martin-Weg 63, 97074 Würzburg — 2Fraunhofer Entwicklungszentrum Röntgentechnik (EZRT), Dr.-Mack-Str. 81, 90762 Fürth
3D X-ray imaging is a very important tool in both medicine and materials characterization. We present an ultra-high resolution X-ray laminography system based on a thin-film X-ray transmission target which is coupled to an electron probe micro analyzer. Unlike in axial tomography 3D imaging is realized through a linear translation of both detector and object with respect to the source.
A characterization of the spatial resolution of the detector has to be performed both under direct and under oblique illumination (i.e., at large laminography angles). This characterization comprises imaging of resolution test structures, determination of modulation transfer function and sensitivity and the simulation of the detector response using the Monte Carlo X-ray simulation tool ROSI.
Based on these measurements and simulations we develop possibilities and algorithms to approach the position-dependent behavior of the detector in order to achieve the highest image quality.