Regensburg 2013 – wissenschaftliches Programm

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 1: Future Requirements on Vacuum Pumps and Vacuum Gauges

VA 1.1: Hauptvortrag

Montag, 11. März 2013, 10:00–10:40, H6

The Birth of a New Turbo-Molecular Pump — •Martin Tollner — Oerlikon Leybold Vacuum, 50968 Cologne, Germany

From the initial market requirement specification to product launch the process of developing a new turbo-molecular pump for the vacuum market is full of complex engineering challenges. The on-going requirement to always have better performance, lower cost and improved reliability pushes engineers to continuously improve their methods of work. Striving to improve turbo-molecular pump performance requires state of the art engineering modelling tools, which in some cases are not commercially available. To maximise pumping performance, pumping mechanism modelling tools are required to accurately model and optimise a pump design for a variety of gas types across the molecular, transitional and viscous flow regimes. Also a detailed understanding of material properties as well as rotor stress simulation is required to increase performance by increasing rotational speed and blade velocities. Thermal limitations usually dictate the performance envelope of a pump, therefore the ability to accurately model and understand the thermal behaviour of a pump is the key to enhancing the performance envelope. Once the initial design concept is proven, there is a detailed series of validation, compliance and reliability testing required to ensure the product is safe and reliable before product launch. This talk aims to give an overview of the various methods, tools and processes used to develop a world class turbo molecular pump from requirement through to product launch.