Regensburg 2013 – wissenschaftliches Programm

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 4: Vacuum Systems and Tools

VA 4.3: Vortrag

Montag, 11. März 2013, 15:40–16:00, H6

Pumping Systems for Ultra and Extreme High Vacuum Level — •Enrico Maccallini, Andrea Cadoppi, and Paolo Manini — SAES Getters S.p.A, viale Italia 77, 20020, Lainate (Mi), Italy.

Nowadays, Ultra and Extreme High Vacuum (UHV and XHV respectively) levels are increasingly required in several vacuum-related systems (i.e., Surface Science, Thin Film Deposition, Cold Atomic Trap, Portable Systems, Electron Microscopes, Particle Accelerator and Synchrotron Radiation Source).

Non Evaporable Getter (NEG) pumps are one of the possible technical options to get XHV/UHV in the vacuum systems. The achievement of XHV/UHV is possible thanks to the high reactivity of the getter materials towards active gases such as H2, H2O, CO2, CO, O2, N2. If the getter material is saturated, the pumping speed of NEG pumps can be easily restored by a reactivation process which can be carried out in a short period (approximately 1-2 hours) and with low power consumption.

Experimental results achieved by NEG pump technology in combination with other pumping systems are presented. The benefits of using NEG pumps in XHV/UHV systems are highlighted in terms of fast pumpdown, large pumping speed for hydrogen, possible reduction of bake out time and baking temperature, reduction of magnetic interference and portability.