Dresden 2014 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 62: Posters: Surface Reactions and Dynamics, Nanostructures
O 62.19: Poster
Mittwoch, 2. April 2014, 17:30–21:00, P1
Tunable Silicon Nanowire Arrays Based on A New Method to Transfer Large Area of Ultra-Thin Alumina Membranes — •Ahmed Al-Haddad1,2, Ranjith Vellacheri1, Samar Tarish1,2, Yan Zheng1, Liaoyong Wen1, Yang Xu1, and Yong Lei1 — 1Institute for Physics and IMN MacroNano (ZIK), Ilmenau University of Technology, Prof. Schmidt Str. 26, 98693 Ilmenau, Germany. — 2Department of Physics, College of Science, The University of Mustansiryah, Baghdad, Iraq.
A new effective method was developed to transfer large area ultra-thin alumina membrane (UTAM) with Au thin film as supporting layer to Si wafer. UTAM was prepared by a two-step anodization of aluminum foil with controllable thicknesses (100-400nm), followed by the transportation to Si wafer using a special cell and the removal of the backside Al and barrier Al2O3 layer. Several drops of DI water were added on Si before placing the UTAM to increase the adhesion between UTAM and Si surface. Furthermore, ordered Au nanodots arrays on Si surface were obtained by physical vapor deposition of Au with a thickness of 20 nm, which could be further used for. Moreover, the obtained Au grid from supporting UTAM was used for metal-assisted chemical etching to fabricate Si nanowires arrays. Furthermore, the structure and surface morphology were examined by Raman spectroscopy and scanning electron microscopy, respectively.