Regensburg 2016 – wissenschaftliches Programm
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MM: Fachverband Metall- und Materialphysik
MM 59: Topical session: In-situ Microscopy with Electrons, X-Rays and Scanning Probes in Materials Science VII - Nanomaterials
MM 59.3: Vortrag
Donnerstag, 10. März 2016, 16:45–17:00, H38
A setup for AFM-based pick-and-place handling of nano-objects inside an SEM — •Uwe Mick1,2, Peter Banzer1,2,3, Silke Christiansen1,4, and Gerd Leuchs1,2,3 — 1Max Planck Institute for the Science of Light, Erlangen, Germany — 2Institute of Optics, Information and Photonics, University Erlangen-Nuremberg, Erlangen, Germany — 3Max Planck - University of Ottawa Centre for Extreme and Quantum Photonics, Ottawa ON, Canada — 4Institute of Nano-Architectures for Energy Conversion, Helmholtz-Zentrum Berlin, Berlin, Germany
Employing AFM technology for nanomanipulation is well-established. However, as a stand-alone technology, the AFM lacks immediate visual feedback on the manipulation in progress. Here we present a Dual-AFM system that is integrated into an SEM and dedicatedly designed to enable pick-and-place handling of nano-objects under the in-situ visual control of the SEM. Several usage scenarios for handling nanowires and nanoparticles down to below 100 nm in diameter are shown; including general schemes for adapting the shape of AFM probe tips by FIB milling to specific manipulation tasks. As the main application, the prototyping of plasmonic particle patterns is presented and specifically the capability to select building blocks from different sources to fabricate heterogeneous nanoparticle patterns. When preparing glass samples for photonic applications in an SEM, additional challenges arise. Therefore, a toolchain of methods and instruments for pre-characterizing and selecting suitable nano-building-blocks and mitigating charging effects during sample preparation are outlined.