Bremen 2017 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 22: Theory and Modelling II
P 22.1: Poster
Mittwoch, 15. März 2017, 16:30–18:30, HS Foyer
An Ar/O2 collisional radiative model for the plasma plume of an assist source in PIAD — •Jochen Wauer, Jens Harhausen, Rüdiger Foest, and Detlef Loffhagen — Leibniz Institut für Plasmaforschung und Technologie, Felix-Hausdorff-Strasse 2, 17489 Greifswald
Plasma ion
assisted deposition (PIAD) is a technique commonly used to produce
high-precision optical interference coatings. Knowledge regarding plasma
properties is most often limited to dedicated scenarios without film deposition
[1]. Approaches have been made to gather information on the process plasma in
situ [2] to detect drifts which are suspected to cause limits in
repeatability of resulting layer properties. Present efforts focus on radiance
monitoring of the plasma plume of an Advanced Plasma Source (APSpro,
Bühler) by optical emission spectroscopy
to provide the basis for an advanced
plasma control.
In this contribution modelling results
of the plume region are presented to
interpret these experimental data. In the
framework of the
collisional radiative model used,
17 argon and 14 oxygen states in the plasma are considered.
The electron energy distribution function was gained in measurements. Results of the species densities are compared
with the measured optical emission of various argon 2p − 1s transitions and the oxygen 777nm and 844nm lines.
This work was funded by BMBF under grant 13N13213.
[1] Harhausen et al.,
Plasma Sources Sci. Technol.
21 (2012) 035012
[2] Styrnoll et al.,
Plasma Sources Sci. Technol.
22 (2013) 045008