Berlin 2018 – wissenschaftliches Programm
DS 17.61: Poster
Dienstag, 13. März 2018, 18:15–20:15, Poster B
Large-scale spray deposition of carbon nanotube-based thin-film devices — •Florin-Cristian Loghin1, Aniello Falco2, Marco Bobinger1, Alaa Abdellah1, Markus Becherer1, Paolo Lugli2, and Almudena Rivadeneyra1 — 1Institute for Nanoelectronics-Technische Universität München, Munich, Germany — 2Free University of Bozen-Bolzano, Bozen-Bolzano, Italy
Due to their remarkable electrical and mechanical characteristics, Carbon nanotubes (CNTs) are ideal candidates for a wide range of applications. The possibility to fabricate CNT thin-films via solution processing techniques has enabled the way to low-cost CNT thin-film devices including thin-film transistors (TFTs) and circuits, thermal and chemical sensors as well as transparent conductive films (TCFs). In this contribution, we report on a spray deposition technique, which can produce uniform, reproducible thin-films suitable for a wide range of applications. The use of non-invasive solvents (DI-H2O) as well as low processing temperatures (<65°C) permits for the process to be easily integrated into existing technology platforms. Furthermore, the resolution down to 10 CNTs/um2 per deposited layer allows for precise device engineering. In order to better display this technology, proof of concept devices were fabricated and characterized, including TFTs, chemical sensors and TCFs.