Berlin 2018 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 33: Poster Session III
HL 33.35: Poster
Mittwoch, 14. März 2018, 17:30–19:30, Poster F
H2S-sensing in the sub-ppm region with a ZnO nanowire ChemFET — •Angelika Kaiser, Florian Huber, Yujia Liu, Klaus Kolb, Manfred Madel, and Klaus Thonke — Institute of Quantum Matter / Semiconductor Physics Group, Ulm University
The medical role of hydrogen sulfide (H 2 S) has been extensively studied over the past few years, revealing a variety of crucial medical applications. These are reaching from cancer therapeutics to medical diagnostics via breath analysis. Such a reliable breath analysis, which is selectively aiming at the detection of ppb-range concentrations of the biomarker H2S, requires a gas sensing device with a well understood and effective sensing mechanism.
We investigated resistive gas sensors based on the conductivity change of ZnO NWs under different gas exposure, which effectively act as ChemFETs with open gate. The sensitive element is formed by the surface of ZnO NWs, and operates as a transducer between ongoing adsorption reaction on the NW sensor surface and the resistivity change in the NWs leading to a measurable electrical signal. The goal of our work is to design a stable sensor with an optimal translation of the chemical surface reactions into a detectable electrical signal. Therefore, we grew and electrically compared various sets of VLS grown ZnO NWs, which additionally were characterized by SEM micrographs and analysed by low-temperature PL-spectroscopy.