Regensburg 2019 – wissenschaftliches Programm
HL 45.52: Poster
Donnerstag, 4. April 2019, 18:30–21:00, Poster E
Growth and functionalisation of ZnO nanowires for H2S detection in the low ppb region for medical purpose — •Angelika Kaiser1, Yujia Liu1, Florian Huber1, Klaus Thonke1, and Ulrich Herr2 — 1Institute of Quantum Matter / Semiconductor Physics Group, Ulm University — 2Institue of Functional Nanosystems, Ulm University
Over the past few years, the medical role of hydrogen sulfide (H2S) in the human body was extensively investigated. Revealing numerous medical applications, e.g. H2S acting as a biomarker for asthma or as a moderator in the glucose metabolism, a reliable H2S detection mechanism for target gas concentrations in the parts per billion range (ppb range) is needed. In our research we focus on resistive gas detection using nanostructured metal oxide grown by chemical-vapor-deposition (CVD). Different types of ZnO nanowires (ZnO NW) were grown either by the vapor-liquid-solid (VLS) method with gold catalyst on silicon, or by the vapor-solid (VS) method without catalyst on sapphire. To overcome the poor stability or selectivity of metal oxides towards gases, we investigate the impact of various post growth treatments on the H2S detection by ZnO. Possible treatments are the annealing in O2 rich and O2 poor atmosphere, or ZnO NW surface functionalistation with gold (Au) and copper (Cu) nanoparticles. Because the planar sensor design used is effectively a ChemFET formed by the ZnO NWs with gas sensitive open gate, the suitability of these is tested by electrical measurements. Here, H2S sensing is performed at room temperature and in synthetic air to mimic the characteristic of the human breath.