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DS: Fachverband Dünne Schichten
DS 24: Layer Properties II: Optical Properties
DS 24.2: Vortrag
Mittwoch, 18. März 2020, 11:15–11:30, CHE 91
Highly reflective, stable mirror coatings for NIR and MIR spectral range by Atomic Layer Deposition — •Paul Schenk1,2 and Adriana Szeghalmi1,2 — 1Fraunhofer-Institute for Applied Optics and Precision Engineering IOF, Center of Excellence in Photonics, Albert-Einstein-Str. 7, D-07745 Jena, Germany — 2Friedrich-Schiller-University Jena, Institute of Applied Physics, Albert-Einstein-Str. 15, D-07745 Jena, Germany
Thin and smooth mirror coatings are essential for numerous optical systems in spectroscopy, astronomy, sensing, and lightning. Metallic reflectors cover from the ultraviolet to infrared a very broad spectral range. Well-established materials for highly reflective mirrors in the near (NIR) and mid (MIR) infrared spectral range are aluminum, silver, and gold. However, these materials degrade due to mechanical stress on the surface or thermal exposure, which leads to a decrease in reflectivity.
Iridium is a noble metal that has a reflectivity in the NIR and MIR spectral range similar to the established materials. It is very hard, extremely dense, chemically very stable and can be deposited as a smooth metal thin film by atomic layer deposition (ALD). It is scratch-resistant, abrasion-stable and thermally stable. Due to its enormously high melting point of over 2400 °C, it can even resist the highest temperatures. In the presented work, we studied the mechanical and thermal stability of iridium mirrors with regard to their reflectivity in the NIR and MIR spectral range.