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DS: Fachverband Dünne Schichten
DS 28: Poster: Thin Film Properties: Structure, Morphology and Composition
DS 28.6: Poster
Mittwoch, 18. März 2020, 15:00–18:00, P1A
Light element analysis using an external proton beam — •Felix Junge1, Masahiro Saito1,3, Kim Holm1,2, Felipe Lipp Bregolin1, and Hans Hofsäss1 — 1II. Institute of Physics, Georg-August-Universität Göttingen, 37077 Göttingen, Germany — 2Institut für Physik, 06120 Halle, Germany — 3Toray Research Center Inc., 3-3-7, Sonoyama, Otsu, Shiga 520-0842, Japan
In this work, we describe the new setup for light element depth profiling using a 2.7 MeV external proton beam and helium gas atmospheric pressure conditions. This setup is used to simultaneously perform backscattering spectrometry (BS) and H-H coincidence elastic recoil detection analysis (C-ERDA) in transmission. The beam is extracted through a 170 nm diamond membrane of 1 mm2 size. Polyamide and Mylar foils were used as reference samples. In addition, thin titanium layers were deposited on 100 nm to 500 nm thick Si3N4 membranes by magnetron sputtering and loaded with hydrogen using an inductively coupled plasma. H concentration profiles were investigated as a function of film preparation and plasma loading conditions. Furthermore, thin amorphous carbon layers with hydrogen content were produced by magnetron sputter deposition and examined with simultaneous BS and C-ERDA measurements. In order to investigate the possibility of detecting all light elements, samples of lithium manganese oxide were examined and the lithium was measured by NRA. The aim of our research is the development of an efficient method for the quantitative analysis and depth profiling of all light elements of a sample.