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DS: Fachverband Dünne Schichten

DS 28: Poster: Thin Film Properties: Structure, Morphology and Composition

DS 28.7: Poster

Mittwoch, 18. März 2020, 15:00–18:00, P1A

GTSAXS measurements on resistively switching strontium titanate thin film structures — •Richard Valenta, Kilian Wilden, Christoph Boehnke, and Uwe Klemradt — 2. Physikalisches Institut, RWTH Aachen, Deutschland

We present an application of a novel variant of small angle x-ray scattering (Granzing incidence transmission small angle x-ray scattering (GTSAXS)) for structural analysis of resistively switching thin oxide films. Resistive Random Access Memory is a promising candidate for novel data storage techniques. Our samples consist of a thin strontium titanate layer sandwiched between a bottom electrode and a structured top electrode. By means of voltage pulses the devices can be switched reversely between different resistive states distinguished by creation and rupture of conductive filaments. Using GTSAXS we were able to detect a strong signal sensitive to the different resistive states which can be related to the shape of the filaments.