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DS: Fachverband Dünne Schichten
DS 9: Optical Analysis of Thin Films
DS 9.3: Vortrag
Montag, 16. März 2020, 15:30–15:45, CHE 91
Grazing incidence X-ray fluorescence measurement on nanostructures for element sensitive reconstruction — •Anna Andrle1, Philipp Hönicke1, Philipp-Immanuel Schneider1, Yves Kayser1, Martin Hammerschmidt2, Sven Burger2,3, Frank Scholze1, Burkhard Beckhoff1, and Victor Soltwisch1 — 1Physikalisch-Technische Bundesanstalt, Abbestrasse 2-12, 10587 Berlin, Germany — 2JCMwave GmbH, Bolivarallee 22, 14050 Berlin, Germany — 3Zuse Institute Berlin, Takustrasse 7, 14195 Berlin, Germany
The production of the current and next generation of semiconductor devices requires a reliable and non-destructive characterization of the material composition and dimensional parameters of the nanostructures is necessary. A method based on grazing incidence X-ray fluorescence measurements is applied to lamellar gratings made of Si3N4. This technique is based on the X-ray standing wave field, which is sensitive to both the elemental composition and dimensional parameters of the nanostructures. With a finite element Maxwell solver, the X-ray standing wave field can be calculated and used in conjunction with a parameterized nanostructure to model experimental data and thus, derive the spatial distribution of elements and the geometric shape with subnm resolution. This reconstruction is executed with a Bayesian optimization approach to minimize the computational effort.