Dresden 2020 – wissenschaftliches Programm
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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur
KFM 5: Microscopy and Spectroscopy with X-rays, Ions and Positrons (joint session KFM/CPP)
KFM 5.6: Vortrag
Montag, 16. März 2020, 17:00–17:20, TOE 317
Detection system for transmission imaging in helium ion microscope — •Eduardo Serralta1, Nico Klingner1, Olivier De Castro2, Serge Duarte Pinto3, Cecilia Bebeacua4, Stefan Findeisen1, Olivier Bouton2, Tom Wirtz2, and Gregor Hlawacek1 — 1Helmholz-Zentrum Dresden-Rossendorf, Dresden, Germany — 2Luxembourg Institute of Science and Technology, Esch-sur-Alzette, Luxembourg — 3Photonis Netherlands B.V, Roden, Netherlands — 4Eidgenössische Technische Hochschule, Zürich, Switzerland
Transmission imaging in the helium ion microscope allows to measure mass-thickness contrast and reveal crystallographic information. We recently customized a microchannel plate followed by a delay line readout structure especially for this application. This system can correlate the scanning transmission ion image to the angular distribution of the transmitted ions. An in-vacuum linear support is used to place the detector at different distances from the sample, adjusting the maximum collection angle. Post-processing allows the reconstruction of images for selected scattering angles. The first results show images with nanometer resolution, material contrast, and identification of sub-surface features in biological tissues. This work has been supported by the H2020 Project npSCOPE under grant number 720964.