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K: Fachverband Kurzzeit- und angewandte Laserphysik
K 2: Poster
K 2.12: Poster
Dienstag, 15. März 2022, 16:30–18:30, P
Orthogonally Superimposed 3D Laser-Induced Periodic Surface Structure (LIPSS) upon Femtosecond Laser Pulse Irradiation of Silicon surface for Surface Enhanced Raman Scattering (SERS) application. — •Hardik Vaghasiya1,2, Stephan Krause1,2, Christian Hagendorf2, and Paul-Tiberiu Miclea2,1 — 1Martin Luther University Halle-Wittenberg, ZIK Sili-nano, Halle, Germany. — 2Fraunhofer Center for Silicon Photovoltaics CSP, Germany.
We report on the generation of homogenous low spatial frequency LIPSS on crystalline silicon with beam-shaped femtosecond pulsed laser irradiation at 1030 nm wavelength. Three-dimensional laser-induced periodic surface structures with pattern sizes periodicity around laser wavelength are obtained on the silicon surfaces. The distinctive orthogonally superimposed 3D LIPSS is achieved by employing a double step technique that relies on irradiation with two temporally delayed and cross-polarized femtosecond-laser pulses. In silicon, orthogonally superimposed 3D LIPSS structure of a few nanometers to micron in amplitudes were produced over a larger area, and the influence of the applied laser fluence, pulse overlap, and angle of incidence on the periodic surface structures are investigated. The periodicity and amplitude of 3D LIPSS can be tuned by controlling the number of pulses irradiation and applied laser fluence. Finally, this work presents novel, multi-scale periodic patterns with three-dimensional symmetry generated on the silicon surface, for sensor application, e. g. SERS-substrates.