Erlangen 2022 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 41: Nano-Optics
Q 41.3: Poster
Mittwoch, 16. März 2022, 16:30–18:30, P
Fabrication of Photonic Crystal Cavities with Triangular Cross-Section in Silicon Carbide — •Marcel Krumrein1, Rainer Stöhr1, Jonathan Körber1, Vadim Vorobyov1, Raphael Nold1, Lukas Niechziol1, Lin Jin2, Patrick Berwian3, Wolfram Pernice2, Florian Kaiser1, and Jörg Wrachtrup1 — 13rd Institute of Physics, IQST, and Research Centre SCoPE, University of Stuttgart, Germany — 2Institute of Physics, AG Pernice, University of Münster, Germany — 3Fraunhofer Institute for Integrated Systems and Device Technology IISB, Erlangen, Germany
Defect centers in Silicon Carbide (SiC) are promising candidates for quantum information applications as they possess very good optical and spin properties. As published recently, triangular-shaped waveguides can guide the defect centers' emission very efficiently and are quite resilient to fabrication imperfections [1]. The implantation of the V2 center into waveguides with triangular cross-section while preserving their spin-optical properties as nearly lifetime-limited emission was recently shown [2]. On this basis, the integration of these defect centers into cavities to enhance the photon emission is desirable. This is important for efficient single-shot read-out and other quantum information protocols. In this contribution, we present the necessary steps of fabricating photonic crystal cavities in 4H-SiC including e-beam lithography and reactive ion etching. Our focus lies on the simultaneous realization of an efficient interface for waveguide-fiber coupling.
[1] Sridhar Majety et al., J. Phys. Photonics 3 034008 (2021).
[2] Charles Babin et al., arXiv:2109.04737 [quant-ph] (2021).