DPG Phi
Verhandlungen
Verhandlungen
DPG

Mainz 2022 – scientific programme

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P: Fachverband Plasmaphysik

P 1: Invited talks I

Monday, March 28, 2022, 11:00–12:30, P-H11

11:00 P 1.1 Invited Talk: Plasma Physics in EUV Lithography — •Iris Pilch
11:30 P 1.2 Invited Talk: Optical emission spectroscopy of spokes in magnetron sputtering discharges — •Julian Held, Philipp A Maaß, Volker Schulz-von der Gathen, and Achim von Keudell
12:00 P 1.3 Invited Talk: Surface modification of inorganic materials by atmospheric-pressure plasmas — •Claus-Peter Klages and Vitaly Raev
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