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P: Fachverband Plasmaphysik
P 1: Invited talks I
Monday, March 28, 2022, 11:00–12:30, P-H11
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11:00 | P 1.1 | Invited Talk: Plasma Physics in EUV Lithography — •Iris Pilch |
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11:30 | P 1.2 | Invited Talk: Optical emission spectroscopy of spokes in magnetron sputtering discharges — •Julian Held, Philipp A Maaß, Volker Schulz-von der Gathen, and Achim von Keudell |
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12:00 | P 1.3 | Invited Talk: Surface modification of inorganic materials by atmospheric-pressure plasmas — •Claus-Peter Klages and Vitaly Raev |