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P: Fachverband Plasmaphysik

P 2: Low Pressure Plasmas I

P 2.4: Vortrag

Montag, 28. März 2022, 14:45–15:00, P-H11

Plasma diagnostics combination: Calorimetric Probe and Retarding Field Analyser — •Felix Schlichting and Holger Kersten — Christian-Albrechts-Universität, Kiel, Deutschland

A recently developed plasma diagnostic, which combines a retarding field analyser (RFA) and a passive thermal probe (PTP), has been used for the characterization of different plasma environments. The PTP serves as the collector of the RFA, in front of which three centrally aligned grids are operated as the retarding field system. In this setup the collector does not only measure the incoming ion current depending on the voltage applied to the grids of the RFA, but also the incoming energy flux density of the impinging ions or neutrals, respectively. In this study the combined diagnostic is used in an RF plasma, where the probe is embedded into the grounded electrode, as well as in a DC Magnetron sputtering system, where the probe is located at substrate position. The ion energy distribution (IED) is determined regarding the energy exchange of the neutral background gas with the ions extracted from the plasma source. Furthermore, with suitable voltage applied to the grids of the RFA, the secondary electron emission from the collector can be quantified in regard to the ion energies and the material used for the collector plate.