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P: Fachverband Plasmaphysik

P 21: Atmospheric Pressure Plasmas II

P 21.1: Talk

Friday, April 1, 2022, 14:00–14:15, P-H11

Production of crystalline silicon nanoparticles in an atmospheric plasma jet — •Maren Dworschak¹, Filip Matějka², Niklas Kohlmann³, Pavel Galář², and Jan Benedikt¹ — ¹Institute of Experimental and Applied Physics, Kiel University, Germany — ²Institute of Physics, Czech Academy of Sciences, Czech Republic — ³Faculty of Engineering, Kiel University, Germany

Due to their opto-electrical properties semiconductor nanoparticles can be used in a wide range of applications including photovoltaic cells. Cold atmospheric plasmas are highly reactive systems that can be used for the generation of such nanoparticles. Compared to low pressure systems the production of crystalline particles is more challenging, but also provides economical benefits. We report on an RF-driven capacitively coupled atmospheric plasma jet with a dielectric on the electrodes. The so-called HelixJet [1] can be operated at large powers and elevated gas temperature, where its operation is not compromised by depositions inside the jet. Its original setup has been modified with an additional electrode to work reliable even at high admixtures of reactive gases. Using silane, silicon nanoparticles with precise size control can be generated over a broad range of sizes. Different reactive gas admixtures are used to modify the surface passivation of the generated nanoparticles. Under the right conditions it is possible for the particles to become crystalline. Their crystallinity is observed through measurements of (time-resolved) photoluminescence, Raman spectroscopy and TEM measurements.
[1] J. Schäfer et al., Plasma Process. Polym. 17 (2020)