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P: Fachverband Plasmaphysik

P 21: Atmospheric Pressure Plasmas II

P 21.4: Talk

Friday, April 1, 2022, 14:45–15:00, P-H11

VUV-photoionization chamber for the selective study of ion-substrate interactions — •Kerstin Sgonina, Alexander Quack, Christian Schulze, and Jan Benedikt — Institute of Experimental and Applied Physics, Kiel University, Germany

The high reactivity of cold atmospheric pressure plasmas, for example with biological substrates, is in addition to the reactive neutral oxygen and nitrogen species, also based on additive or synergistic effects of these reactive species with charged species, photons, and electric fields. In contrast to photons or electric fields, the study of the isolated effect of ions with biological substrates or ion-based deposition of thin films is more challenging as their isolated production under atmospheric pressure conditions is not trivial. To prove the expected enhanced effect of ions due to their charge and internal energy, knowledge about the ion composition and absolute ion fluxes to the substrate is needed.

To study the isolated effect of ions on substrates and ion-based thin film deposition, an experimental setup has been developed in which photoionized ions are directed towards the substrate. The ions are generated in a helium atmosphere with a small admixture of O₂, C₂H₂ or other gaseous species by VUV-radiation of the helium excimer emission (60-100 nm) generated by a helium driven atmospheric pressure plasma. Mass spectra and relative ion fluxes along the substrate position are measured by ion mass spectrometry. Combined with spatial resolved current measurements, the absolute ion flux can be determined. The deposition of thin films with ions generated from C₂H₂ will be discussed.