P 2: Low Pressure Plasmas I
Monday, March 28, 2022, 14:00–15:15, P-H11
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14:00 |
P 2.1 |
Influence of a remote plasma on the chemical vapour deposition of ZrO2 based layers — •Philipp A. Maaß, Vitali Bedarev, Sebastian M. J. Beer, Marina Prenzel, Marc Böke, Anjana Devi, and Achim von Keudell
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14:15 |
P 2.2 |
High-resolution terahertz spectroscopy with quantum-cascade lasers for atomic oxygen density measurements — •Jente Wubs, Uwe Macherius, Klaus-Dieter Weltmann, and Jean-Pierre van Helden
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14:30 |
P 2.3 |
Operando FTIR monitoring of silicon nanoparticle treatment in a low-pressure plasma — •Oguz Han Asnaz and Jan Benedikt
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14:45 |
P 2.4 |
Plasma diagnostics combination: Calorimetric Probe and Retarding Field Analyser — •Felix Schlichting and Holger Kersten
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15:00 |
P 2.5 |
Selbstkonsistente Modellierung einer linearen Mikrowellenplasmaquelle in einem Magnetfeld — •Stefan Merli, Andreas Schulz, Matthias Walker, Yannick Kathage, Stefan Hanke und Christian Day
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