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P: Fachverband Plasmaphysik
P 4: Low Pressure Plasmas II / Laser Plasmas II
P 4.1: Vortrag
Montag, 28. März 2022, 16:00–16:15, P-H11
Secondary electron induced effects in the ion energy distribution of a symmetrical capacitively coupled plasma — •Christian Schulze1, Zoltán Donkó2, and Jan Benedikt1 — 1Institute of Experimental and Applied Physics, Kiel University, Germany — 2Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary
The Particle in Cell/Monte Carlo Collisions (PIC/MCC) approach is established as a widespread simulation tool in low pressure plasma science since it offers access to a variety of plasma parameters and - in conjunction with experiments - can provide information about surface properties that are not directly measurable in experiments. However, PIC/MCC simulations are based on simplifications. For example, secondary electron emission (SEE) is usually described by an effective yield for ion (γeff) and electron (reff) impact that include other effects leading to SEE like photoemission or kinetic SEE by fast atoms. In order to describe experimental conditions correctly experimental validations are necessary to estimate realistic input parameters. Here, ion flux-energy distributions are measured with an energy-selective mass spectrometer in a geometrically symmetric capacitively coupled plasma and compared with data obtained from 1d3v PIC/MCC simulations. Surface induced effects are studied with Al2O3 coated electrodes in comparison to uncoated stainless steel electrodes. The observed changes can be explained by altered plasma properties due to an increase in SEE in the case of an oxidized surface. With this comparative approach, the effective SEE coefficients γeff and reff are estimated.