Parts | Days | Selection | Search | Updates | Downloads | Help

P: Fachverband Plasmaphysik

P 9: Poster I

P 9.46: Poster

Tuesday, March 29, 2022, 16:00–17:30, P

2D spatially resolved atomic oxygen densities in a micro cavity plasma array — •David Steuer, Henrik van Impel, Volker Schulz-von der Gathen, Marc Böke, and Judith Golda — Experimental Physics II: Physics of Reactive Plasmas, Ruhr-University Bochum, D-44801 Bochum, Germany

Micro cavity plasma arrays have numerous applications, such as the treatment of volatile organic compounds (VOCs) or the generation of ozone. The key to these applications is the generation of reactive species such as atomic oxygen within the plasma. Typically, atomic oxygen densities can be measured by laser spectroscopic methods. In the case of the micro plasma array, which consists of thousands of cavities, optical access is limited. For this reason, an optical emission spectroscopy (OES) approach, energy resolved actinometry (ERA), is used. 2D resolved measurements can be performed by using an ICCD camera in combination with a tunable bandpass filter. The discharge is operated in helium with an oxygen admixture of 0.1%. The triangular voltage is varied at a frequency of 15 kHz between an amplitude of 400-800V. As the voltage increases, the number of ignited cavities rises. Furthermore, the atomic oxygen density per cavity increases with the power. This work is supported by the DFG via SFB 1316 (project A6).