Regensburg 2022 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 13: Thin Film Applications 2

DS 13.1: Vortrag

Mittwoch, 7. September 2022, 09:30–09:45, H14

Investigation of Production Techniques for Sputtered Tungsten Thin Films — •Tobias Ortmann¹, Andreas Erhart¹, Margarita Kaznacheeva¹, Angelina Kinast¹, Alexander Langenkämper¹, Luca Pattavina¹, Walter Potzel¹, Johann Riesch², Johannes Rothe¹, Nicole Schermer¹, Stefan Schönert¹, Raimund Strauß¹, Victoria Wagner¹, and Alexander Wex¹ — ¹Technische Universität München, Physik Department Lehrstuhl E15, James-Franck-Straße 1, D-85748 Garching — ²Max-Planck-Institut für Plasmaphysik, Boltzmannstraße 2, D-85748 Garching bei München

Cryogenic rare event searches like the CRESST and the NUCLEUS experiments use TES (Transition Edge Sensors) as phonon sensors to read out their target crystals. This type of sensors utilizes the superconducting phase transition of tungsten to measure the energy deposited in the absorbers. The most established method of production for these films is electron beam physical vapor deposition. For future large scale production the application of argon DC-magnetron sputtering is investigated in terms of film quality and reproducibility. The most recent results of these investigations are presented. The research was supported by the DFG through the Excellence Cluster ORIGINS and the SFB1258, and the BMBF: 05A17WO4 and 05A17VTA.