Regensburg 2022 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 13: Thin Film Applications 2
DS 13.2: Vortrag
Mittwoch, 7. September 2022, 09:45–10:00, H14
Preparation of RuVO2 alloy thin films and theirs uncooled infrared detection performance — •Hao Lu1,2,3, Yunbin He3, and Peter J. Klar1,2 — 1Institute of Experimental Physics I, Justus-Liebig-University, Giessen, Germany — 2Center for Materials Research (ZfM), Justus-Liebig-University, Giessen, Germany — 3School of Materials Science and Engineering, Hubei University, Wuhan 430062, China
Vanadium dioxide (VO2) films are the most popular materials for sensing layers in uncooled IR detectors because of their high TCR of -2.0 %/K, low noise, low thermal conductivity. The monoclinic phase (M1) of VO2 undergoes an insulator-to-metal transition at 341K which is accompanied by the crystal structure changing from tetragonal to rutile. The structural phase transition exhibits a thermal hysteresis, which reduces the sensitivity of the minimum temperature change detectable indicative for the IR intensify. So we focused on decreasing the thermal hysteresis width whilst increasing TCR, and carried out the following study: (022) oriented RuVO2 alloy thin films were prepared on TiO2 (110) substrates by pulsed laser deposition. It was found that the thermal hysteresis width of RuVO2(M1) for Ru content contents above 7% is smaller than for corresponding binary VO2. The TCR of such RuVO2 alloy films was -5.2%/K, and the thermal hysteresis was no longer observable from electrical properties. This work demonstrates the potential of VO2 (M1) for the development of the IR detector.