Regensburg 2022 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 20: Poster
DS 20.14: Poster
Mittwoch, 7. September 2022, 16:00–18:00, P3
Characterization of layer systems by combination of X-ray reflectivity and hyperspectral imaging — •Steffen Bieder1, Florian Gruber2, Patrick Schlenz3, Phillipp Wollmann2, Christian Albers1, Susanne Dogan1, Michael Paulus1, Nicola Thiering1, Christian Sternemann1, and Steffen Cornelius3 — 1TU Dortmund, 44227 Dortmund, Germany — 2Fraunhofer IWS, Winterbergstrasse 28, 01277 Dresden, Germany — 3Fraunhofer FEP, Winterbergstrasse 28, 01277 Dresden, Germany
Different thin film multilayers consisting of indium tin oxide, zinc tin oxide and silver deposited on flexible PET foils were studied using X-ray reflectivity and hyperspectral imaging aiming for an online quality control of the coatings' manufacturing process. The X-ray reflectivity data measured at beamline BL9 of the DELTA synchrotron radiation source provide detailed information on layer thickness with Angström resolution, roughness and electron density. These results are used to establish statistical models in order to analyze and interpret the data obtained from hyperspectral imaging. Latter is foreseen to be implemented into the foils' production line for in-situ detection of thickness changes during the production process.
The authors acknowledge funding from the European Union's Horizon 2020 research and innovation programme under grant agreement No 862055. We thank DELTA for providing synchrotron radiation.