Regensburg 2022 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 4: Thin Film Properties: Structure, Morphology and Composition (XRD, TEM, XPS, SIMS, RBS, AFM, ...) 2
DS 4.2: Vortrag
Montag, 5. September 2022, 11:15–11:30, H14
Solid-state microstructural evolution and dewetting of CoxCu100−x thin films — •Farnaz Farzam1, Bárbara Bellón1, Matteo Ghidelli1,2, María Jazmin Duarte Correa1, Dominique Chatain3, José A. Jiménez4, and Gerhard Dehm1 — 1Max-Planck-Institut für Eisenforschung GmbH, Düsseldorf, Germany — 2LSPM, CNRS, Université Sorbonne Paris Nord, Villetaneuse, France — 3Aix-Marseille Univ, CNRS, CINaM, Marseille, France — 4Centro Nacional de Investigaciones Metalúrgicas (CENIM-CSIC), Avda. Gregorio del Amo, 8,28040 Madrid, Spain
Metallic thin films can undergo severe microstructural and morphological evolution, while maintaining their solid state at high temperatures below their melting point(TM). These structural changes such as hillock formation and texture evolution can be followed by solid-state dewetting(SSD) in which capillary forces finally break up the film into isolated particles. Here, we investigate the microstructural evolution of CoxCu100−x thin films with x equal to 15, 38 and 75 at.%. Films were deposited on (0001) sapphire and annealed below their TM. Subsequently, characterization has been carried out using scanning and transmission electron microscopy(SEM, TEM), and X-ray diffraction(XRD). Upon annealing, Cu-rich hillocks form in all three compositions prior to voids at which dewetting initiates. The onset temperature of the formation of these hillocks depends on the composition of the film. Moreover, a phase separation of FCC Co and FCC Cu is observed. Finally, we show an orientation relationship of Cu (FCC) and Co (FCC)-rich isolated particles with sapphire: Cu/Co (111) ± [110] ∥ Al2O3 (0001)[1010].