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O: Fachverband Oberflächenphysik

O 13: Nanostructures at Surfaces 2

O 13.1: Vortrag

Montag, 5. September 2022, 15:00–15:15, S052

A new setup for dimensional nanometrology using soft X-rays — •Leonhard Lohr¹, Richard Ciesielski¹, Analía Fernández Herrero², Andreas Fischer¹, Alexander Grothe¹, Frank Scholze¹, and Victor Soltwisch¹ — ¹Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587 Berlin, Germany — ²Helmholtz-Zentrum Berlin für Materialien und Energie, Albert-Einstein-Straße 15, 12489 Berlin, Germany

Measuring nanostructured surfaces on small test patterns on dies from semiconductor fabs is an important metrology challenge. The geometrical dimensions of metrology test structures, such as linear gratings, must be determined with uncertainties in the sub-nm range. By using methods such as small angle X-ray scattering or X-ray fluorescence under grazing incidence, the photon beam spot size becomes too large for sufficient accurate measurements.

We present a new setup, mounted on the soft X-ray beamline in PTB’s laboratory at the electron storage ring BESSY II. This setup works with synchrotron radiation in an ultra-high vacuum and with lubricant-free mechanics. Its small and compact design enables to detect scattered monochromatic soft X-rays under angles of incidence up to 30 degrees. The setup reduces photon beam spot size and covers diffraction patterns like them from scattered hard X-rays under grazing incidence. Depending on the incident photon energy, fluorescence from small excited regions of the sample can be measured simultaneously.

We present first measurement results from small test patterns which are located by imaging the surface using a large photon beam.