Regensburg 2022 – wissenschaftliches Programm
QI 4.37: Poster
Montag, 5. September 2022, 18:00–20:00, P2
Optimizing Fabrication Parameters for Superconducting Coplanar Waveguide Resonators — •David Bunch1,2,3, Leon Koch1,2,3, Niklas Bruckmoser1,2,3, Kedar E. Honasoge1,2, Yuki Nojiri1,2,3, Thomas Luschmann1,2,3, Tammo Sievers1,2,3, Kirill G. Fedorov1,2, and Stefan Filipp1,2,3 — 1Physik-Department, Technische Universität München, 85748 Garching, Germany — 2Walther-Meißner-Institut, Bayerische Akademie der Wissenschaften, 85748 Garching, Germany — 3Munich Center for Quantum Science and Technology (MCQST)
Superconducting circuits are a promising platform for the implementation of a universal quantum computer. However, the coherence times of superconducting qubits that make up such systems are limited by material losses, leading to errors in quantum gates. In particular, the coherence time is predominantly limited by coupling to unwanted two level systems (TLS) located at material interfaces. Identifying fabrication techniques, materials, and thin-film dielectrics that reduce losses is essential to achieve scalable architectures for superconducting quantum computing. To evaluate the efficacy of different fabrication techniques we measure the quality factor of superconducting microwave resonators. We present results on optimal sputtering parameters for enhancing the internal quality factor of superconducting coplanar waveguide resonators and investigate the effects of different etching processes, cleaning methods, and surface treatments on these resonators. We validate our results by fabricating qubits with high coherence times.