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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur

KFM 7: Focus: High-resolution Lithography and 3D Patterning

KFM 7.3: Talk

Wednesday, March 29, 2023, 09:50–10:10, POT 51

3D direct laser writing of miniature optical apertures with highly absorptive photoresist — •Michael Schmid^1,2, Andrea Toulouse^2,3, Simon Thiele^2,3,4, Simon Mangold^1,2, Alois Herkommer^2,3, and Harald Giessen^1,2 — ¹4th Physics Institute, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany — ²Research Center SCoPE, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany — ³Institute of Applied Optics (ITO), University of Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany — ⁴Printoptix GmbH, Johannesstraße 11, 70176 Stuttgart

In recent years, 3D direct laser writing and its possible application developed rapidly. Different complex micro-optical systems have been demonstrated, such as multi-lens objectives. However, it is still challenging to integrate microscopic apertures to these systems. We present a novel approach to create 3D direct laser written apertures using an opaque material suitable for 2-photon lithography. This way, it is possible to integrate microscopic apertures into 3D printed micro-optical systems improving the imaging quality. We demonstrate this potential by combining 3D printed black apertures with singlet lenses made of the commonly used photoresist IP-S. A significant contrast improvement of the imaging is achieved. Furthermore, due to the absorption coefficient, it is possible to create thin lenses with the black material enabling the fabrication of optical lens and aperture in one step.