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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur

KFM 7: Focus: High-resolution Lithography and 3D Patterning

KFM 7.4: Vortrag

Mittwoch, 29. März 2023, 10:10–10:30, POT 51

Self-Folding micro cubes of laser-cut templates — •Pierre Lorenz¹, Ye Yu², Ronald Franz³, Joachim Zajadacz¹, Martin Ehrhardt¹, Robert Kirchner², Gregory Lecrivain³, and Klaus Zimmer¹ — ¹Leibniz Institute of Surface Engineering, Permoserstr. 15, Leipzig, 04318, Germany — ²Institute of Semiconductor and Microsystems, TU Dresden, Nöthnitzer Straße 64, Dresden, 01187, Germany — ³Helmholtz-Zentrum Dresden-Rossendorf, Institut für Fluiddynamik, Bautzner Landstraße 400, Dresden, 01328, Germany

3D microstructures exhibit manifold applications with compact system integration in mind. Especially self-folding processes of laser-cut 2D templates allow for fast, flexible, and cost-effective fabrication of 3D structures. A UV ps laser was used for the laser cut of polyimide foil-based 2D templates. Two different folding concepts were tested: water-droplet self-folding and vacuum micro forming (VMF). The VMF concept is based on an array of cavities in a Teflon plate, which work similarly to deep drawing as a guide for the VMF of the 2D templates. In the water-droplet concept, a water droplet was added by a tweezer with a defined volume resulting in self-folding due to the surface tension. Both concepts allow the well-defined folding of sub-mm cubes after optimization of the 2D template geometry. Especially the VMF allows a parallelization and miniaturization of the folding process, which was monitored and analyzed by high-speed imaging.