SMuK 2023 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 5: Atmospheric Pressure Plasmas and their Applications I

P 5.1: Hauptvortrag

Dienstag, 21. März 2023, 11:00–11:30, CHE/0089

Diagnostics of metal-grid micro cavity plasma arrays — •Marc Böke¹, David Steuer², Sebastian Dzikowski¹, Henrik van Impel², Volker Schulz-von der Gathen¹, and Judith Golda² — ¹Physics of Reactive Plasmas, Ruhr-University Bochum, D-44801 Bochum, Germany — ²Plasma Interface Physics, Ruhr-University Bochum, D-44801 Bochum, Germany

Micro-structured plasma discharges offer great potential for a variety of applications, such as large-area treatment, catalytic conversion, or decomposition of volatile organic compounds. Therefore, they are of high relevance from a technical and scientific point of view. To understand the processes, fundamental knowledge about the discharge mechanisms and dynamics and generation of reactive species is necessary. Here, we investigate metal-grid micro cavity plasma arrays of well-defined microdischarges. They are modular in construction and allow stable operation and the use of catalysts. The plasma arrays are operated in helium with admixtures of reactive gases, typically in the percentage range, and excited by triangular voltage amplitudes of 400-800V at kHz frequencies. Diagnostics in these cavities are challenging due to their small dimensions in the range of 100µm and the limited access because of the encapsulation of the plasma cavities. Therefore, we apply optical emission-based methods to determine electric fields (Stark shift) or 2D resolved densities of reactive species (e.g. by state enhanced actinometry). The basic discharge behavior like discharge modes and spatial distribution, electrical characteristics and dynamics will be discussed. Supported by the DFG within SFB 1316.