Regensburg 2007 – wissenschaftliches Programm
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CPP: Fachverband Chemische Physik und Polymerphysik
CPP 19: POSTER: Micro and Nano Fluidics
CPP 19.13: Poster
Mittwoch, 28. März 2007, 16:00–18:30, Poster B
Wet Chemical and Dry Plasma Surface Hydrophilisation of epoxy-based Polymers (SU-8) — •Ferdinand Walther1, Polina davidovskaya1, Stefan Zürcher2, Michael Kaiser3, Helmut Herberg3, Alexander M. Gigler1, and Robert W. Stark1 — 1CeNS and Crystallography, LMU München, Germany — 2Laboratory for Surface Science and Technology, ETH Zurich, Switzerland — 3University of Applied Sciences, FB06, Munich, Germany
The effect of oxygen plasma treatment on surface energy, topography and surface chemistry of the negative photoresist epoxy novolak SU-8 was investigated by contact angle goniometry, atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). Directly after plasma treatment, the surfaces were completely wetted by water with a contact angle between water and the SU-8 surface below five degrees. The surface free energy can be increased significantly depending on the plasma dose. The surfaces remained hydrophilic for several months showing a moderate hydrophobic recovery. The surface topography of the plasma treated SU-8 showed a formation of nanoscale aggregates. The rms-roughness of the topography was correlated with the plasma dose. An increased plasma dose induced aggregates of up to 200 nm in size. XPS measurements revealed changes in surface chemistry due to the plasma process and an increased antimony concentration on the surface.